| 摘要 |
<p>This apparatus for inspecting warpage of a board-like body is provided with: a transfer apparatus (3), which transfers a glass substrate (2) in substantially horizontal attitude; and a non-contact displacement meter (4), which measures the distance to the surface of the glass substrate (2). An upper limit wave shape (X1) and a lower limit wave shape (X2) are previously set by having, as reference, an ideal wave shape (X0) of surface shape displacement of the glass substrate (2) with respect to the transfer direction, said ideal wave shape having been obtained corresponding to the characteristics of the transfer apparatus (3), and it is determined whether actual wave shapes (X3, X4) of the surface shape displacement of the glass substrate (2) with respect to the transfer direction (A) while the glass substrate is being transferred are within a range between the upper limit wave shape (X1) and the lower limit wave shape (X2), said actual wave shapes having been obtained on the basis of the distance measured by means of the displacement meter (4).</p> |
