发明名称 PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric device that has corrected malfunctions in a manufacturing process, and to provide a method for manufacturing the piezoelectric device.SOLUTION: A method for manufacturing a piezoelectric device includes the steps of: preparing a plurality of green sheets for piezoelectric layers each having electrode patterns, corresponding to respective electrodes 20, 30, and 40, formed therein; obtaining a green sheet laminate on a surface of which the electrode patterns corresponding to the respective electrodes 20 and 30 are arranged, by laminating the plurality of green sheets for piezoelectric layers as prepared; pressurizing the green sheet laminate as obtained with a warm isostatic press; and baking the green sheet laminate as pressed.
申请公布号 JP2014017401(A) 申请公布日期 2014.01.30
申请号 JP20120154592 申请日期 2012.07.10
申请人 TDK CORP 发明人 TATEMOTO KAZUSHI;KOMATSU YUZO;ITAKURA KEISUKE;SASAKI MASASHI
分类号 H01L41/22;H01L41/09;H01L41/187;H01L41/257 主分类号 H01L41/22
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