MANUFACTURING METHOD OF SILICON BY MICROWAVE AND MICROWAVE REDUCTION FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of silicon by a microwave and a microwave reduction furnace, capable of promptly reducing silica to speedily manufacture silicon.SOLUTION: The manufacturing method of silicon by a microwave comprises: charging a raw material consisting of a mixture of a silica powder and a graphite powder or a mixture of a silica powder, a silicon carbide powder and a graphite powder into a container made of a refractory material; irradiating the charged material in the container with a microwave to increase the temperature of the graphite powder by absorbing a microwave energy; reacting the silica and the graphite to form a silicon carbide; reacting the silica and the silicon carbide by further heating; and reacting SiO formed by the reaction and the silicon carbide to form a high purity silicon.