| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device and a method of detecting foreign material in the substrate conveying device which can suppress erroneous detection by a detection sensor caused by a substrate end part support member.SOLUTION: A movable base part 31a is moved in a direction separating from a fixed base part 31b and is made to wait in a standby position [T], and respective conveyer support members 28 are respectively moved in second positions [P2]. Side shifting operation of the movable base part 31a is started from this state, and inspection light r is projected from a projector 32a to a photodetector 32b to execute detection operation of foreign material. Thereby, the inspection light r passes through a position separating from a substrate end part support member 29a as compared with a case that a conveyer support member 28a is in a first position [P1]. Thus, even when warpage deformation is generated on the substrate end part support member 29a, it can be suppressed that the warpage deformation is erroneously detected as foreign material existing on a moving path of the conveyer support member 28a. |
