| 摘要 |
[Problem] To accurately determine the life of an electrode within a chamber. [Solution] A laser device may be provided with: a laser chamber that has a laser gain medium inserted therein; a pair of electrodes that are provided within the laser chamber and, due to the generation of electrical discharge, excite the laser gain medium; a charger that applies a charging voltage in order to generate the electrical discharge within the laser chamber; a pulse power module that impresses the charging voltage applied by the charger to the pair of electrodes in short pulses; and a control unit that calculates the input energy (Ein) on the basis of the charging voltage, calculates the integrated value (Einsum) of the input energy by integrating the calculated input energy (Ein), and determines whether an integrated value (Einsum) of the input energy is greater than an integrated life value (Einsumlife) of the input energy. |
