| 摘要 |
The adapter used in the sputtering chamber or the sputtering tool is provided. The adapter body of the adapter has a central hole and at least one cooling channel embedded therein. The cooling channel circulates the adapter body with a fluid flowing therein, and the cooling channel is set surrounding the central hole and is located between a border of the adapter body and the central hole. The adapter having the cooling channel improves the cooling efficiency of the heater as well as the yield of the sputtering chamber. |
