发明名称 PROCESSING METHOD OF WORKPIECE
摘要 PROBLEM TO BE SOLVED: To provide a processing method of a workpiece capable of suppressing occurrence of burrs extending upward from the working surface or toward the space.SOLUTION: The processing method of a workpiece W for cutting the workpiece W, having a ductile material formed at least on the dividing lines, by means of a cutting blade 2 along the dividing lines includes a workpiece fixing step S2 for embedding and fixing the workpiece W in an ice substrate I having a size larger than the outer shape of the workpiece W, in a state where the surface of the workpiece W is in parallel with the surface of the ice substrate I, a cutting step S3 for cutting the workpiece W from the surface side thereof up to the ice substrate I, following to the workpiece fixing step, and then cutting the workpiece W along the dividing lines together with the ductile material, and a removing step S4 for removing the ice substrate I from the workpiece W by melting and changing it to liquid or gas phase, following to the cutting step.
申请公布号 JP2014017330(A) 申请公布日期 2014.01.30
申请号 JP20120152938 申请日期 2012.07.06
申请人 DISCO ABRASIVE SYST LTD 发明人 HARADA SHIGENORI;OTAKE YUSUKE
分类号 H01L21/301 主分类号 H01L21/301
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