| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide meso structure having a structural period and good orientation on a substrate.SOLUTION: An oxide meso structure 1060 has a structure in which a cylinder shape structure 1050 is filled in a honeycomb form, wherein an orientation direction of the cylinder shape structure is a constant direction over the inside of a film plane, and out of elements composing an oxide of the oxide meso structure film, a number of atoms (X) of silicon to which an alkyl group of a carbon number of at least 8 bonds, to a number of atoms (Y) of silicon or a metal element, is at least 0.1 and at most 0.5, as the atom number ratio of (X/Y). |
