发明名称 VERTICAL PROBE, MANUFACTURING METHOD OF VERTICAL PROBE, AND ATTACHMENT METHOD OF VERTICAL PROBE
摘要 PROBLEM TO BE SOLVED: To provide a vertical probe that prevents damage to vertical probes to be arranged or already arranged when attached to a probe attachment body, and improve accuracy of a leading edge position thereof.SOLUTION: A vertical probe of the present invention includes: a vertical probe body that has a contact leading edge contacting an electrode of a test body at a leading edge of a linear leading edge part, and is attached to a probe attachment body; and a tab that is removably connected with the vertical probe body, and functions as a knob. The tab has an artificial contact leading edge that is formed at a position on an extension of a straight line of the leading edge part, and is artificially used as the contact leading edge in position control and attitude control using a photographed image.
申请公布号 JP2014016205(A) 申请公布日期 2014.01.30
申请号 JP20120152934 申请日期 2012.07.06
申请人 MICRONICS JAPAN CO LTD 发明人 TAKEYA TOSHINAGA
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
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