摘要 |
PROBLEM TO BE SOLVED: To resolve a problem occurring when forming a light absorption layer of a compound thin film solar cell such as a chalcopyrite type and a kesterite type by sulfurizing or seleniding the light absorption layer from a precursor that a compression stress associated with volume expansion occurs in the precursor and sometimes peeling from an underlayer occurs thereby to manufacture the light absorption layer having a good film quality while inhibiting peeling.SOLUTION: A photoelectric conversion device manufacturing method comprises a process of forming a precursor including two and more kinds of metal elements and oxygen within a range of 25 atom%-60 atom%, and subsequently forming a light absorption layer by performing a sulfuration treatment on the precursor. |