ENHANCED CLEANING PROCESS OF CHAMBER USED PLASMA SPRAY COATING WITHOUT DAMAGING COATING
摘要
A method including immersing a ceramic coated article into a bath including an HF acid solution having NH4F with a molar concentration of about 0.1M to 1.0M for a time period to remove a deposition, and rinsing the ceramic coated article.
申请公布号
WO2014018833(A1)
申请公布日期
2014.01.30
申请号
WO2013US52202
申请日期
2013.07.26
申请人
APPLIED MATERIALS, INC.;BANDA, SUMANTH;SUN, JENNIFER Y.
