| 摘要 |
A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; at least one effluent nozzle for ejecting the effluent gas stream into the combustion chamber; and a perforated liner proximate to the combustion surface. Providing a perforated liner controls the combustion materials passing into the combustion chamber to treat the effluent gas stream and also provides a surface onto which residual combustion deposits may be received. Accordingly, the liner can both improve the efficiency of the treatment of the effluent gas stream and can act as a sacrificial surface which may be replaced or cleaned either in accordance with a maintenance regime or when the performance of the radiant burner reduces. Such replacement or cleaning of the liner saves having to replace the porous sleeve or other components of the combustion chamber which cannot readily be removed or cleaned. This enables the radiant burner to operate at higher flow rates and avoids needing to increase the size of the radiant burner or needing to add further radiant burners. |
