| 摘要 |
<p>Disclosed is a robust three-friction-force stepper driven by two piezoelectric bodies side by side, the stepper comprising two piezoelectric bodies (2a, 2b), a base (1), and a slide rod (3), wherein the two piezoelectric bodies (2a, 2b) are arranged in parallel in a stretching direction and fixedly stand on the base (1) side by side to form a double piezoelectric body structure. In addition, the stepper further comprises a bridging piece (4), wherein the left and right ends of the bridging piece (4) are respectively fixed to free ends of the two piezoelectric bodies (2a, 2b); the slide rod (3) is arranged to be in sliding fit with the two piezoelectric bodies (2a, 2b) in the stretching direction; positive pressures for pressing the slide rod (3) to the left and right ends of the bridging piece (4) and a positive pressure for pressing the slide rod (3) to the base (1) are arranged in the direction perpendicular to the stretching direction of the two piezoelectric bodies (2a, 2b); and among maximum static friction forces to the slide rod (3) generated by the three positive pressures, any maximum static friction force is smaller than the sum of the other two maximum static friction forces. The present invention has small dimensions, high rigidity, can easily satisfy the friction force condition and optimal friction force condition, and is suitable for the application in a coarse approximation motor of a high-sensitivity atomic resolution scanning probe microscope in extreme conditions.</p> |
