| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow sensor which has corrosion resistance and facilitates its manufacture.SOLUTION: A flow sensor includes: a glass-made pedestal 11 which has the upper and lower surface, and a wiring hole 15 with its diameter getting narrower from the lower surface to the upper surface; and a chip 20 arranged on the upper surface of the pedestal 11. The chip 20 includes: a glass-made substrate 21 arranged on the upper surface of the pedestal 11; a flow speed detection part 22 including an electric resistance element 23, which is arranged on the upper surface of the substrate 21; and an electrode 24 which penetrates through the substrate 21 and is electrically connected to the electric resistance element 23. Moreover, the flow sensor further includes an electrical conduction member 45 which is arranged inside the wiring hole 15 of the pedestal 11 and electrically connected to the electrode 24. |
