发明名称 METHOD FOR PROVIDING PHOTORESIST AND PHOTORESIST DISPENSING APPARATUS
摘要 A method for providing a photoresist includes providing a pressure reducing and increasing device connected to a photoresist storage bottle and a photoresist supply tank; and performing a pressure reducing step to create a suction force to move a photoresist from the photoresist storage bottle into the photoresist supply tank.
申请公布号 US2014027535(A1) 申请公布日期 2014.01.30
申请号 US201213562258 申请日期 2012.07.30
申请人 PAN YU-CHUN 发明人 PAN YU-CHUN
分类号 B05B9/00 主分类号 B05B9/00
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