| 摘要 |
In a piezoelectric actuator (1) that vibrates a diaphragm (12) provided on a pressure chamber (21) formed in a substrate (11) toward the pressure chamber (21), a lower electrode (13), a piezoelectric member (14) and an upper electrode (15) sequentially stacked on the diaphragm (12) are provided, on a part of the piezoelectric member (14) above the side wall of the pressure chamber (21), an upper electrode drawing portion (15a) drawn out from the upper electrode (15) above the pressure chamber (21) is formed and under the upper electrode drawing portion (15a), the piezoelectric member (14) is separated by a gap portion (S) above a boundary surface between the side wall (21a) of the pressure chamber (21) and the pressure chamber (21) in the substrate (11). |
