发明名称 |
COMPOSITION FOR REMOVING AND PREVENTING FORMATION OF OXIDE ON THE SURFACE OF METAL WIRE |
摘要 |
The present invention proposes a method for removing an oxide formed on the surface of a copper film used in the process of manufacturing a circuit for a semiconductor, an organic light-emitting diode, an LED, or a liquid crystal display without causing corrosion on a lower metal film. The composition comprising corrosive amine may remove a metal oxide depending on the content of additive ranging from 0.01 to 10% regardless of the content of ultrapure water. A polar solvent other than the corrosive amine may efficiently remove an oxide from the surface of metal when same contains water and 0.01 to 20% of the additive. |
申请公布号 |
WO2014017819(A1) |
申请公布日期 |
2014.01.30 |
申请号 |
WO2013KR06615 |
申请日期 |
2013.07.24 |
申请人 |
LTC CO., LTD. |
发明人 |
CHOI, HO SUNG;RYU, KWANG HYUN;BAE, JONG IL;LEE, JONG SOON;YANG, HYE SUNG;HA, SANG KU |
分类号 |
C23F1/44;C23F1/10 |
主分类号 |
C23F1/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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