发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 According to one embodiment, the stair array includes a deep portion, one stair, and a plurality of stairs. The one stair is provided next to the deepest portion in the first direction and has a level difference of one step with the deepest portion. Each of the stairs has a level difference of a plurality of steps with a stair next in the first direction.
申请公布号 US2014027838(A1) 申请公布日期 2014.01.30
申请号 US201313950564 申请日期 2013.07.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KIDO NOZOMI;KOMORI YOSUKE
分类号 H01L27/088;H01L21/8232 主分类号 H01L27/088
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