| 摘要 |
Provided is a phase shift interferometer which comprises: a light source; an incident light path; a light circulation unit; a connection path; a light splitting/combining unit; a probe light path; a reference light path; a test sample measurement unit; a light terminal; a light-phase shifting unit which is provided in either the probe light path or the reference light path, and subjects light to phase shifting by a phase shift quantity of alphai/2 (radian units, where alphai is a real number, the range of values taken by alphai is 0@alphai@3pi/2, and i is an integer where 3@i), and periodically changes the phase shift quantity of alphai/2; a light-emission path; a light detector which outputs an interference signal; and a controller for controlling the phase shift quantity in the light-phase shifting unit and the cycle at which the phase shift is controlled. |
