| 摘要 |
A substrate processing device is disclosed. The substrate processing device according to the present invention joins a sensor to a supporting member by inserting an insertion protrusion of the sensor into a guide route of the supporting member which is joined to the sensor to be parallel to a door moving direction. Then, the longitudinal position of the sensor is not needed to be adjusted, and only the vertical position of the sensor is needed to be adjusted so that the installation of the sensor is facilitated. Furthermore, a body to be sensed is joined to a door to face the sensor joined to the supporting member so that the body to be sensed is easily joined to the door. Therefore, the productivity of the substrate processing device is improved in case of the mass production of the substrate processing device by easily assembling the sensor and the body to be sensed. |
