FIVE DEGREE OF FREEDOM STITCHING METHOD AND SYSTEM OF THREE DIMENSONAL PROFILE DATA

摘要

Disclosed are a five degree of freedom matching method of three-dimensional profile data for high-precision measurements and large-area measurements and a system for the same. A five degree of freedom matching method of three-dimensional measurement data may comprise; a stage wherein measurements are made for large measurement areas consisting of a plurality of small measurement areas for measurement subjects so that each small measurement area is to have a common area with the adjacent area, and three-dimensional measurement data are generated for each small area constituting a large measurement area for the measurement subject; a stage to extract a common area among measurement subjects in a global coordinate system based on the three-dimensional measurement data; a stage to calibrate mismatching among the measurement subjects due to driving errors occurring in a horizontal direction for the measurement area at a stage of transferring the measurement subjects to the measurement area by calibrating each of the three-dimensional measurement data based on the calculated correlation coefficients after calculation of correlation coefficients for each of the common areas extracted using mutual correlation functions; a stage to calibrate driving errors occurring in a vertical direction for the measurement area and errors due to rotation by recalibrating the calibrated three-dimensional measurement data using global least square fitting; and a stage to generate three-dimensional shape data of the continued large areas by joining each of the recalibrated small area measurement data. [Reference numerals] (AA) Start; (BB) End; (S310) Set an area for measurement; (S320) Measure all set area by calculating common area and transfer amount; (S330) After combining coordinate systems for each 3D measurement data and converting to a global coordinate system, extract each common area in the global coordinate system; (S340) After calculating space delay amounts for correlation coefficient lines of each X axis and Y axis, calculate their average values and translationally move the 3D measurement data; (S350) Re-extract a common area for changed 3D measurement data; (S360) Match 3D measurement data by using global least square method