| 摘要 |
A memory includes memory cells each includes a resistance change element and a diode. The diode comprises areas which is provided in order of a first semiconductor area with a first conductivity type, a second semiconductor area with the first conductivity type, and a third semiconductor area with a second conductivity type, from the column lines to the row lines. An atom density of impurities with the first conductivity type in the second semiconductor area is lower than that in the first semiconductor area. The diode comprises a fourth semiconductor area with the first conductivity type at an end portion in a third direction of the second semiconductor area, the third direction is perpendicular to a direction from the column lines to the row lines, and an atom density of impurities with the first conductivity type in the fourth semiconductor area is higher than that in the second semiconductor area. |
