LAMINATE FOR FORMING FINE PATTERN, AND METHOD FOR PRODUCING LAMINATE FOR FORMING FINE PATTERN

摘要

Disclosed is a layered product for fine pattern formation and a method of manufacturing the layered product for fine pattern formation, capable of easily forming a fine pattern having a thin or no remaining film in order to form a fine pattern having a high aspect ratio on a processing object. The layered product for fine pattern formation (1) of the present invention used to form a fine pattern (220) in a processing object (200) using a first mask layer (103) includes: a mold (101) having a concavo-convex structure (101 a) on a surface; and a second mask layer (102) provided on the concavo-convex structure (101a), wherein in the second mask layer (102), a distance (1cc) and a height (h) of the concavo-convex structure (101a) satisfy Formula (1) 0 < 1cc < 1.0h, and a distance (1cv) and the height (h) satisfy Formula (2) 0 ‰¤ 1cv ‰¤ 0.05h.