SURFACE FOREIGN MATERIAL DETECTING SYSTEM AND CONTROL METHOD THEREOF

摘要

The surficial foreign material detecting system according to the present invention comprises: a stage part for holding a detected object on the top surface and controlling the height of the top surface; a light source irradiating part separated from the stage part to irradiate a detecting light parallel to the surface of the detected object depending on detecting conditions; a photographing part which is mounted on a support separated upward from the stage part to be movable, and which photographs image information containing information on the foreign materials of the detected object by receiving scattered light from the surface of the detected object; a control part which is connected to the stage part, the light source irradiating part and the photographing part, and which detects the information on the surficial foreign materials by receiving the image information from the photographing part; and a display part for displaying the surficial foreign material information received from the control part. [Reference numerals] (140) Control part; (150) Display part