发明名称 AN APPARATUS FOR GROWING SILICON SINGLE CRYSTAL AND A METHOD OF GROWING THE SAME
摘要 One embodiment a device for growing monocrystalline silicon comprising: a crucible for holding a silicon melt; a heat shield for surrounding monocrystalline silicon which is grown from the silicon melt; an image photographing part for photographing a shoulder which is grown by a shouldering process, and obtaining an image data according to the photographed result; and a control part for calculating the weight of the shoulder by using the image data, and controlling the raising or lowering of the crucible on the basis of the calculated weight of the shoulder.
申请公布号 KR20140011625(A) 申请公布日期 2014.01.29
申请号 KR20120078169 申请日期 2012.07.18
申请人 LG SILTRON INCORPORATED 发明人 KANG, JONG MIN;HA, SE GEUN
分类号 C30B15/20;C30B29/06 主分类号 C30B15/20
代理机构 代理人
主权项
地址