| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a photovoltaic device having an excellent short circuit current and an excellent open circuit voltage, and to obtain a method of manufacturing the same and a photovoltaic module. <P>SOLUTION: In a photovoltaic device, on a light-receiving surface side surface of a first conductivity type semiconductor substrate 11, an amorphous thin film 12 containing silicon and carbon and whose composition ratio of the silicon and the carbon is 7:3 to 5:5, and a microcrystal thin film 13 containing silicon, carbon and second conductivity type impurities and having a cubic structure, are laminated in this order. The amorphous thin film 12 has resistance to a process performed at a temperature equal to or more than 300°C when the microcrystal thin film 13 having the cubic structure is formed. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
