MANUFACTURING METHOD FOR NANO-POWDER USING SUPPORTER

摘要

The present invention uses a manufacturing apparatus for nanopowders attached to supporters comprising: a vacuum evaporation tub; an agitation tub which is equipped in the vacuum evaporation tub; a screw which is equipped within the agitation tub and agitates supporters; and an evaporation source which is equipped in the upper part of the agitation tub within the vacuum evaporation tub and generates steam particles for forming nanoparticles. The present invention provides a manufacturing method for nanopowders attached to the supporters comprising: a) a step of including inert gas in a vacuum evaporation tub so that the vacuum degree of the vacuum evaporation tub is 10-4 to 1 torr; b) a step of producing steam particles for forming nanoparticles by using the evaporation source; c) a step of agitating supporters by controlling the speed of the screw at 1-200 rpm; and d) a step of forming nanoparticles by evaporating steam particles on the supporters.