发明名称
摘要 <p>A thin film transistor substrate having a semiconductor layer including a low concentration region and a source region/drain region adjacent to the low concentration region at both sides of a channel region made of polysilicon; a gate insulating layer and a conductive layer on the substrate the conductive layer patterned to form a gate electrode.</p>
申请公布号 JP5399608(B2) 申请公布日期 2014.01.29
申请号 JP20060209726 申请日期 2006.08.01
申请人 发明人
分类号 H01L21/336;H01L29/786 主分类号 H01L21/336
代理机构 代理人
主权项
地址