发明名称 VAPORIZER
摘要 PURPOSE: A vaporizer is provided to improve the efficiency of evaporation by using balls for mixing fluid in a cylinder. CONSTITUTION: A cylinder(120) includes an inlet. Mixed fluid is flowed into the inlet. A first mixing cylinder part(140) includes a central fluid path and first fluid paths. The central fluid path is connected to the cylinder. A second mixing cylinder(160) includes second fluid paths.
申请公布号 KR101339600(B1) 申请公布日期 2014.01.29
申请号 KR20110082134 申请日期 2011.08.18
申请人 发明人
分类号 C23C16/448;H01L21/205 主分类号 C23C16/448
代理机构 代理人
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