| 摘要 |
The purpose of the present invention is to provide a film crack detecting device which recognizes possibility of a particle in real time by detecting a film crack of an unnecessary film attached to a probe unit which is installed within a processing container. The present invention is a film crack detecting device (40) which has a processing container (4) for receiving a processed body (W) and performs film crack detection operation by being installed in a film forming device (2) for forming a thin film on the surface of the processed body. The film crack detecting device comprises; a probe unit (41) which is installed within the processing container; an elastic wave detection unit (42) which detects an elastic wave by be attached to the end of the probe unit; and a determination unit (44) which determines the necessity of maintenance of the processing container based on a detection result of the elastic wave detection unit. Therefore, the film crack detecting device recognizes possibility of the particle in real time by detecting the film crack of the unnecessary film attached to the probe unit which is installed within the processing container. [Reference numerals] (10) (Maintenance unit) wafer board; (2) Film formation unit; (28) Gas supply system; (36) Discharge system; (38) Heating unit; (4) Processing container; (40) Film crack detecting device; (41) Probe unit; (42) Elastic wave detection unit; (44) Determination unit; (45) Display unit; (46) Vertical probe unit; (48) Probe main body; (4A) Internal container; (4B) External container; (50) Attachment back end unit; (68) Strength filter unit; (74) Equipment control unit; (76) Storage medium; (AA) Gas; (BB) Vacuum exhaust; (CC) Cooling gas |
