发明名称 TUBULAR PLASMA SURFACE TREATING APPARATUS
摘要 The present invention relates to a surface processing apparatus using plasma. A tubular plasma surface processing apparatus according to one embodiment of the present invention processes an object by using a tubular plasma electrode and includes a housing, a first tubular electrode, a second tubular electrode, a tubular dielectric, and an AC power source. [Reference numerals] (500) Plasma power device; (AA) Supply non-treatment objects; (BB) Non-treatment objects & discharge plasma gas
申请公布号 KR20140011638(A) 申请公布日期 2014.01.29
申请号 KR20120078234 申请日期 2012.07.18
申请人 KOREA BASIC SCIENCE INSTITUTE 发明人 JUNG, YONG HO;SEOK, DONG CHAN;JEONG, HYUN YOUNG
分类号 H05H1/24;C08J7/00;C23C16/50 主分类号 H05H1/24
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