发明名称 |
TUBULAR PLASMA SURFACE TREATING APPARATUS |
摘要 |
The present invention relates to a surface processing apparatus using plasma. A tubular plasma surface processing apparatus according to one embodiment of the present invention processes an object by using a tubular plasma electrode and includes a housing, a first tubular electrode, a second tubular electrode, a tubular dielectric, and an AC power source. [Reference numerals] (500) Plasma power device; (AA) Supply non-treatment objects; (BB) Non-treatment objects & discharge plasma gas |
申请公布号 |
KR20140011638(A) |
申请公布日期 |
2014.01.29 |
申请号 |
KR20120078234 |
申请日期 |
2012.07.18 |
申请人 |
KOREA BASIC SCIENCE INSTITUTE |
发明人 |
JUNG, YONG HO;SEOK, DONG CHAN;JEONG, HYUN YOUNG |
分类号 |
H05H1/24;C08J7/00;C23C16/50 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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