发明名称
摘要 <p>Provided are an optical element and a method of producing an optical element in which sufficient adhesion with an upper layer can be secured without damaging spectral characteristics. The production method includes the step of forming a first structural body in which a space part and a structural part are alternately and repeatedly arranged, the step of forming an etching stopper layer on an upper part of the structural part, and the step of forming a second structural body on the etching stopper layer by etching.</p>
申请公布号 JP5404227(B2) 申请公布日期 2014.01.29
申请号 JP20090167908 申请日期 2009.07.16
申请人 发明人
分类号 G02B5/30;G02B1/02;G02B5/20 主分类号 G02B5/30
代理机构 代理人
主权项
地址