发明名称 |
Drawing apparatus, method of manufacturing article, and processing apparatus |
摘要 |
A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking deflector located in a vacuum chamber and configured to blank each of the plurality of charged particle beams; a device located in an external chamber in which a gas pressure is higher than a gas pressure in the vacuum chamber, and configured to control the blanking deflector; and a first substrate facing the blanking deflector. The first substrate constitutes a partition which separates the vacuum chamber and the external chamber in a region, of the first substrate, facing the blanking deflector, and includes an electrode which fills a via formed in the region. The device is electrically connected to the blanking deflector via the electrode. |
申请公布号 |
US8637835(B2) |
申请公布日期 |
2014.01.28 |
申请号 |
US201213530225 |
申请日期 |
2012.06.22 |
申请人 |
HIRATA YOSHIHIRO;CANON KABUSHIKI KAISHA |
发明人 |
HIRATA YOSHIHIRO |
分类号 |
G21K5/00;G03F7/20;H03F3/08 |
主分类号 |
G21K5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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