发明名称 Transport conduits for contacts to graphene
摘要 An apparatus comprises at least one transistor. The at least one transistor comprises a substrate, a graphene layer formed on the substrate, and first and second source/drain regions spaced apart relative to one another on the substrate. The graphene layer comprises at least a first portion and a second portion, the first portion being in contact with the first source/drain region and the second portion being in contact with the second source/drain region. One or more cuts are formed in at least one of the first and second portions of the graphene layer. The apparatus allows for lowered contact resistance in graphene/metal contacts.
申请公布号 US8637850(B2) 申请公布日期 2014.01.28
申请号 US201213614199 申请日期 2012.09.13
申请人 DIMITRAKOPOULOS CHRISTOS D.;FRANKLIN AARON D.;SMITH JOSHUA T.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DIMITRAKOPOULOS CHRISTOS D.;FRANKLIN AARON D.;SMITH JOSHUA T.
分类号 H01L29/06 主分类号 H01L29/06
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