发明名称 |
Complex pierced micromechanical part |
摘要 |
The invention relates to a method of fabricating a micromechanical part made of a single piece material. According to the invention, the method includes the following steps: a) forming a substrate which includes the negative cavity for said micromechanical part to be fabricated; b) forming a sacrificial layer on one portion of the substrate; c) depositing particles on the substrate intended to form a germ ination layer; d) removing the sacrificial layer so as to selectively leave one portion of the substrate free of any particles; e) depositing a layer of material by chemical vapour phase deposition so that the material is exclusively deposited where the particles remain; f) removing the substrate to release the micromechanical part formed in said negative cavity. |
申请公布号 |
US8636050(B2) |
申请公布日期 |
2014.01.28 |
申请号 |
US201213365041 |
申请日期 |
2012.02.02 |
申请人 |
CUSIN PIERRE;RICHARD DAVID;DUBOIS PHILIPPE;NIVAROX-FAR S.A. |
发明人 |
CUSIN PIERRE;RICHARD DAVID;DUBOIS PHILIPPE |
分类号 |
B22C7/00;B22D19/00;B22D23/00 |
主分类号 |
B22C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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