发明名称 METHOD OF FABRICATING SINGLE-LAYER GRAPHENE
摘要 <p>Disclosed is a method for manufacturing single layer graphene on a silicon carbide wafer. The disclosed manufacturing method comprises the steps of: forming multiple graphene layers on an SiC wafer; removing multiple graphene layers from a buffer layer, which is the uppermost layer of the SiC wafer and is composed of carbon; and converting the buffer layer into the single layer graphene. [Reference numerals] (S110) Prepare SiC wafer; (S120) Form multiple graphene layers on the SiC wafer; (S130) Remove the multiple graphene layers from a buffer layer composed of carbon which is the uppermost layer of the SiC wafer; (S140) Convert the buffer layer to the graphene layer</p>
申请公布号 KR20140010520(A) 申请公布日期 2014.01.27
申请号 KR20120076281 申请日期 2012.07.12
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 WOO, YUN SUNG;YOON, SEON MI;SHIN, HYEON JIN;LEE, DONG WOOK;CHOI, JAE YOUNG
分类号 C01B31/02;B01J19/10;C01B31/36 主分类号 C01B31/02
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