发明名称 |
EQUIPMENT FOR CONTROLLING BY-PRODUCT IN EXHAUSTION LINE AND PUMP USED FOR PROCESS CHAMBER IN SEMICONDUCTOR FIELD AND CONTROL METHOD FOR THE SAME |
摘要 |
Provided is a pump cleaning apparatus of a semiconductor process system that includes a reaction gas generation part for generating reaction gas active species supplied to a fore line; and a control part for controlling the operation of the reaction gas generation part. The pump cleaning apparatus is equipment for controlling a byproduct and a pump of a semiconductor process system including a fore line between a pump and a process chamber, a pump connected to a process chamber, and the process chamber for a semiconductor process. |
申请公布号 |
KR20140010686(A) |
申请公布日期 |
2014.01.27 |
申请号 |
KR20120077268 |
申请日期 |
2012.07.16 |
申请人 |
TRIPLE CORES KOREA |
发明人 |
KIM, SUNG LAK;EUM, MIN HEUM |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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