| 摘要 |
It is an object of the present invention to prevent a decrease in the concentration of gas inside a sealed container that is loaded onto transportation vehicle. A load port device conveys a container 27 having a gas port to an outer conveyor unit 49 by using a ceiling transportation vehicle 59. This load port device includes a conveyor 47, a purging device 73, and a stocker controller 101. The conveyor 47 extends to the outer conveyor unit 49. The purging device 73 is arranged near the outer conveyor unit 49, and has a gas supply nozzle 79 for supplying purge gas into the container 27 while connected to the gas port, and a first lifting mechanism 87 for moving the gas supply nozzle 79 toward or away from a gas supply port 65. The stocker controller 101 controls the purging device 73 to supply the purge gas into the container 27, and to stop the supplying the purge gas into the container 27 based on an arrival of the ceiling transportation vehicle 59 to the outer conveyor unit 49. |
