发明名称 APPARATUS FOR ORGANIC LAYER DEPOSITION, METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD
摘要 The present invention relates to an apparatus for depositing an organic layer, a method for manufacturing an organic light emitting display device using the same, and an organic light emitting display device manufactured thereby and, more particularly, to an apparatus for depositing an organic layer, a method for manufacturing an organic light emitting display device using the same, and an organic light emitting display device manufactured thereby, capable of performing a fixed patterning process and being suitable for the mass production of large substrates.
申请公布号 KR20140010303(A) 申请公布日期 2014.01.24
申请号 KR20120077361 申请日期 2012.07.16
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 CHOI, YOUNG MOOK
分类号 H01L51/56;C23C14/24 主分类号 H01L51/56
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