| 摘要 |
PURPOSE: A chip transferring apparatus and a chip transferring method using the same are provided to improve drivability by forming a structure which does not give a load between shafts. CONSTITUTION: A first linear motor (1) includes a first mover. A second linear motor (2) is arranged near a moving path of the first mover. A drive switching unit is movably mounted on the first mover. A second mover is formed on the drive switching unit and the second linear motor. A link device is hinged to the second mover. |
