| 摘要 |
PURPOSE: A device for synthesizing nanoparticles is provided to easily synthesize various nanoparticles by using an electromagnetic levitation method, a plasma synthesis method, and an evaporation method. CONSTITUTION: A device for synthesizing nanoparticles (100) comprises a dielectric tube (110), an electromagnetic levitation coil (120), a conductive raw material (02), a levitation power source (130), a first gas supply part (116), a process chamber (140), an RF electrode (142), and a process RF power source (144). The electromagnetic levitation coil is wound around the dielectric tube. The conductive raw material is levitated, heated and evaporated by the electric levitation coil. The levitation power source provides power to the electromagnetic levitation coil. The first gas supply part is placed at the end of the dielectric tube. The process chamber is connected to the other end of the dielectric tube. The RF electrode is placed inside the process chamber. The process RF power source forms plasma by providing RF power to the RF electrode. First nanoparticles generated by the evaporation of the conductive raw material move to the process chamber and are treated by the plasma. [Reference numerals] (AA) First gas; (BB) Second gas |
