发明名称 VITRIFIED BOND SUPER ABRASIVE GRAN WHEEL, AND METHOD FOR MANUFACTURING WAFER USING SAME
摘要 PROBLEM TO BE SOLVED: To provide a vitrified bond super abrasive grain wheel capable of stably exhibiting grinding performance.SOLUTION: There is provided a vitrified bond super abrasive grain wheel 1 having a super abrasive grain layer 13 formed by bonding super abrasive grains 10 with vitrified bonds 20 and 30, wherein the super abrasive grain layer 13 comprises: a first super abrasive grain layer 11 formed by bonding the super abrasive grains 10 with the vitrified bond 20; and a second super abrasive grain layer 12 composed of aggregate super abrasive grains in which the super abrasive grains 10 become clusters with the vitrified bond 30.
申请公布号 JP2014012328(A) 申请公布日期 2014.01.23
申请号 JP20130004598 申请日期 2013.01.15
申请人 ALLIED MATERIAL CORP 发明人
分类号 B24D3/18;H01L21/304 主分类号 B24D3/18
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