发明名称 Spectroscopy Technique Using Merged Spectral Data
摘要 A method of examining a sample comprises mounting the sample on a sample holder; directing a beam of radiation onto a location on the sample, thereby causing a flux of stimulated photonic radiation to emanate from said location; examining said flux using a multi-channel photon-counting detector, thus accruing a measured spectrum for said location; automatically repeating said directing and examining steps for a series of successive locations, the method of which comprises choosing a beam parameter of the input beam that will influence a magnitude of said flux of stimulated photonic radiation; for each location within a first set of locations on the sample, accruing a spectrum using a first value of said beam parameter; for each location within a second set of locations on the sample, accruing a spectrum using a second value of said beam parameter.
申请公布号 US2014021346(A1) 申请公布日期 2014.01.23
申请号 US201313946755 申请日期 2013.07.19
申请人 FEI COMPANY 发明人 STOKS SANDER RICHARD MARIE
分类号 G01N23/225 主分类号 G01N23/225
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