SURFACE INSPECTION DEVICE AND METHOD OF FLOW CASTING SUPPORT, AND SOLUTION FILM FORMING METHOD AND EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To accurately detect a defect such as a very small pin hole without any man power.SOLUTION: The surface of a flow casting band 11a wound on a pair of support drums 12 is inspected. The flow casting band 11a of the part wound on the support drums 12 is scanned with a laser in a width direction. A laser 20 reflected on the flow casting band 11a is received by a receiver 16. The receiver 16 blocks unnecessary light by a light blocking plate 21 having a slit opening 21a. By using a positioning unit 18, a scanner 15 and the receiver 16 are positioned at the inspection position of the flow casting band 11a. The scanner 15 and the receiver 16 are arranged to face the circular arc of the flow casting band 11a, and a very small defect such as a pin hole can be accurately inspected.