发明名称 Strain Adjustment in the Formation of MOS Devices
摘要 A method includes forming a gate stack over a semiconductor substrate, and forming a gate spacer on a sidewall of the gate stack. After the step of forming the gate spacer, the gate spacer is etched to reduce a thickness of the gate spacer. A strained layer is then formed. The strained layer includes a portion on an outer sidewall of the gate spacer, and a portion over the gate stack.
申请公布号 US2014021552(A1) 申请公布日期 2014.01.23
申请号 US201213551413 申请日期 2012.07.17
申请人 WANG YI-WEN;WANG JEN-PAN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG YI-WEN;WANG JEN-PAN
分类号 H01L21/336;H01L27/088 主分类号 H01L21/336
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