发明名称 X-RAY CONVERGING SYSTEM WITH ADJUSTABLE CONVERGING DIAMETER
摘要 PROBLEM TO BE SOLVED: To provide an X-ray converging system capable of changing a converging diameter of X-rays under a diffraction limit using a same converging optical system, in a wide range from 50 nm or lower appropriate for a use in a scanning X-ray microscope to a unit of μm appropriate for a use in an X-ray diffraction microscope.SOLUTION: One focal point of a first ellipse E1 is set as a light source A and the other focal point thereof is set as a common focal point B, and one focal point of a second ellipse E2 is set as a fixed focal point C and the other focal point thereof is overlapped with the common focal point. A shape of a first mirror MU is formed by part ot the first ellipse. A shape of a second mirror MD is formed by part ot the second ellipse. While securing positions of the light source and the fixed focal point, a position of the common focal point and the shapes of the first mirror and the second mirror are changed so as to change a converging diameter at the fixed focal point.
申请公布号 JP2014013169(A) 申请公布日期 2014.01.23
申请号 JP20120150245 申请日期 2012.07.04
申请人 JTEC CORP;OSAKA UNIV 发明人 MATSUYAMA SATOSHI;YAMAUCHI KAZUTO;OKADA HIROMI
分类号 G21K1/06;G21K1/00;G21K7/00 主分类号 G21K1/06
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