摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray converging system capable of changing a converging diameter of X-rays under a diffraction limit using a same converging optical system, in a wide range from 50 nm or lower appropriate for a use in a scanning X-ray microscope to a unit of μm appropriate for a use in an X-ray diffraction microscope.SOLUTION: One focal point of a first ellipse E1 is set as a light source A and the other focal point thereof is set as a common focal point B, and one focal point of a second ellipse E2 is set as a fixed focal point C and the other focal point thereof is overlapped with the common focal point. A shape of a first mirror MU is formed by part ot the first ellipse. A shape of a second mirror MD is formed by part ot the second ellipse. While securing positions of the light source and the fixed focal point, a position of the common focal point and the shapes of the first mirror and the second mirror are changed so as to change a converging diameter at the fixed focal point. |