Elastomer Bonded Rotary Sputtering Target

摘要

A sputtering target assembly and a method for manufacturing are disclosed. The sputtering target assembly comprises a cylindrical sputtering target section having a length greater than approximately thirty-six inches and being comprised of one or more cylindrical ring targets; a cylindrical backing tube positioned inside of the cylindrical sputtering target; at least one electrically conductive shim that makes an electrical connection between the cylindrical sputtering target and the cylindrical backing tube; and an attachment layer comprised of an elastomer positioned between the cylindrical sputtering target and the cylindrical backing tube for attaching the cylindrical sputtering target to the cylindrical backing tube.