SYSTEM AND METHOD FOR PROCESSING OBJECT

摘要

PROBLEM TO BE SOLVED: To provide a processing and a monitoring system capable of selectively performing accumulation and ablation using a reaction gas activated by a particle beam.SOLUTION: A system 1 comprises a particle beam column 26, an object holder 24, and a gas supply device 28. The object holder 24 comprises a base 20, a first table 21 which can move to the base 20, a second table 22 which can move to the first table 21, and a third table 23 which can rotate with respect to the second table 22. A canula 30 of the gas supply device 28 is fixed at the first table 21.