发明名称 |
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
摘要 |
A substrate is transported based on coordinates information indicating a receiving position of the substrate and a placement position of the substrate by a hand. If the substrate is shifted from a first position, the substrate is received by the hand while a center of the substrate is shifted from a normal position of the hand. The hand that holds the substrate is moved toward a second position. A plurality of portions at an outer periphery of the substrate are detected before the substrate is placed. A shift of the substrate with respect to the normal position of the hand is detected based on the detection result, and the coordinates information is corrected such that a shift between a position of the center of the substrate to be placed at the second position by the hand and the center of the second position is canceled. |
申请公布号 |
US2014023776(A1) |
申请公布日期 |
2014.01.23 |
申请号 |
US201313944237 |
申请日期 |
2013.07.17 |
申请人 |
SOKUDO CO., LTD.;DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
KUWAHARA JOJI;TAGUCHI TAKASHI;KASHIYAMA MASAHITO;IWASAKI KOHEI |
分类号 |
B05C13/00 |
主分类号 |
B05C13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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