| 摘要 |
PURPOSE: A susceptor is provided to reduce an effect due to a thermal stress by smoothly flowing a reaction gas. CONSTITUTION: A second susceptor (32) is arranged on the upper surface of a first susceptor (31). A second susceptor is separable from the first susceptor. The first susceptor and the second susceptor have holes (33,34). The holes are inclined. A separation distance between the holes of the first susceptor is different from the separation distance between the holes of the second susceptors. |
